00877cam a2200229 7i4500 0000005407 20070404090000.0 20040507085600.0 xx 00010 eng 0883183676 TK7871.15.F5 D46 1988 Deposition and growth : limits for microelectronics, Anaheim, CA, 1978 editor, G.W. Rubloff. New York: American Institute of Physics, 1988. 388p.: ill.; 25 cm. American Vacuum Society series; 4 American Institute of Physics conference proceedings; no.167 Includes bibliographies and index Microelectronics -- Materials -- Congresses Thin films -- Congresses Rubloff, G. W. American Institute of Physics 0000010068 Book Open Shelf HQ Library