00672cam a2200193 7i4500 0000005749 20070329090000.0 20041214000000.0 xx 00010 eng 0444860959 TK7871.85 I48 1981 Impurity doping processes in silicon edited by F.F.Y.Wang. Amsterdam: North-Holand Publisling Co., 1981. 643p.: ill.; 23 cm. Materials processing: theory and practices; v.2 Includes bibliographical references and index Semiconductor doping Wang, Franklin F. Y. 0000009044 Book Open Shelf HQ Library