Electron beam interactions with solids for microscopy, microanalysis & microlithography : proceedings of the 1st Pfefferkorn Conference, held April 18 to 23, 1982, at the Asilomar Conference Center, Monterey, CA - Pfefferkorn Conference(; Kyser (AMF O'Hare [Chicago], IL: Scanning Electron Microscopy, Inc., 1984)
Includes bibliographical references
Keywords: Solids -- -- Effect of radiation on -- -- Congresses; Electron beams -- -- Congresses; Electrons -- -- Backscattering -- -- Congresses; Backscattering -- -- Congresses; Microlithography -- -- Congresses