High vacuum production in the microelectronics industry
| Main Author: | |
|---|---|
| Published: |
Amsterdam:
Elsevier,
1988.
|
| Series: | Plasma technology;
v.2 |
| Subjects: |
HQ Library
| Call Number: |
TS695 D88 1988 |
|---|
| Accession | Item Category | Format | Status | Notes |
|---|
| 0000008714 | Open Shelf | Book | AVAILABLE |