Impurity doping processes in silicon
| Other Authors: | |
|---|---|
| Language: | English |
| Published: |
Amsterdam:
North-Holand Publisling Co.,
1981.
|
| Series: | Materials processing: theory and practices;
v.2 |
| Subjects: |
| Item Description: | Includes bibliographical references and index |
|---|---|
| Physical Description: | 643p.: ill.; 23 cm. |
| ISBN: | 0444860959 |