Description: Principles of plasma discharges and material processing

Main Author:	Lieberman
Other Authors:	Lichtenberg,
Published:	Hoboken, NJ: Wiley-Interscience, 2005.
Edition:	2nd ed.
Subjects:	Plasma chemistry -- > Industrial applications Plasma dynamics Thin films -- > Surfaces Plasma etching

Physical Description:	xxxv,757p.: ill.; 25 cm.
Bibliography:	Includes bibliographical references (p. 735-748) and index
ISBN:	0471720011