Description: Principles of plasma discharges and material processing

Main Author:	Lieberman
Other Authors:	Lichtenberg,
Published:	New York: John Wiley & Sons, 1994.
Subjects:	Plasma chemistry -- > Industrial applications Plasma dynamics Thin films -- > Surfaces Plasma etching

Physical Description:	xxvi, 571p.: ill.; 25cm.
Bibliography:	Includes bibliographical references and index
ISBN:	0471005570