Electron beam interactions with solids for microscopy, microanalysis & microlithography : proceedings of the 1st Pfefferkorn Conference, held April 18 to 23, 1982, at the Asilomar Conference Center, Monterey, CA
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| Language: | English |
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AMF O'Hare [Chicago], IL:
Scanning Electron Microscopy, Inc.,
1984.
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| Physical Description: | xii,372p.: ill.; 29 cm. |
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| Bibliography: | Includes bibliographical references |
| ISBN: | 0931288304 |