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| LEADER |
01149cam a2200241 7i4500 |
| 001 |
0000006205 |
| 005 |
20061115090000.0 |
| 005 |
20050909000000.0 |
| 008 |
xx 00010 eng |
| 020 |
0 |
0 |
|a 0931288304
|
| 090 |
0 |
0 |
|a QC176.8.R3
|b P44 1984
|
| 110 |
2 |
1 |
|a Pfefferkorn Conference(
|i 1st:
|j Monterey, Calif.)
|
| 245 |
1 |
0 |
|a Electron beam interactions with solids for microscopy, microanalysis & microlithography :
|b proceedings of the 1st Pfefferkorn Conference, held April 18 to 23, 1982, at the Asilomar Conference Center, Monterey, CA
|c edited by David F. Kyser... [et al.] ; managing editor, Daniel Halibey.
|
| 260 |
0 |
0 |
|a AMF O'Hare [Chicago], IL:
|b Scanning Electron Microscopy, Inc.,
|c 1984.
|
| 300 |
|
|
|a xii,372p.:
|b ill.;
|c 29 cm.
|
| 504 |
0 |
0 |
|a Includes bibliographical references
|
| 650 |
0 |
0 |
|a Solids --
|x Effect of radiation on --
|x Congresses
|
| 650 |
0 |
0 |
|a Electron beams --
|x Congresses
|
| 650 |
0 |
0 |
|a Electrons --
|x Backscattering --
|x Congresses
|
| 650 |
0 |
0 |
|a Backscattering --
|x Congresses
|
| 650 |
0 |
0 |
|a Microlithography --
|x Congresses
|
| 700 |
1 |
1 |
|a Kyser,
|h David F.
|
| 999 |
|
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|a 0000008606
|b Book
|c Open Shelf
|e HQ Library
|
