Deposition and growth : limits for microelectronics, Anaheim, CA, 1978
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| Other Authors: | |
| Language: | English |
| Published: |
New York:
American Institute of Physics,
1988.
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| Series: | American Vacuum Society series;
4 American Institute of Physics conference proceedings; no.167 |
| Subjects: |
HQ Library
| Call Number: |
TK7871 15 F5 D46 1988 |
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| Accession | Item Category | Format | Status | Notes |
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| 0000010068 | Open Shelf | Book | AVAILABLE |