Deposition and growth : limits for microelectronics, Anaheim, CA, 1978
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| Other Authors: | |
| Language: | English |
| Published: |
New York:
American Institute of Physics,
1988.
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| Series: | American Vacuum Society series;
4 American Institute of Physics conference proceedings; no.167 |
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| Physical Description: | 388p.: ill.; 25 cm. |
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| Bibliography: | Includes bibliographies and index |
| ISBN: | 0883183676 |