Deposition and growth : limits for microelectronics, Anaheim, CA, 1978
| Corporate Author: | |
|---|---|
| Other Authors: | |
| Language: | English |
| Published: |
New York:
American Institute of Physics,
1988.
|
| Series: | American Vacuum Society series;
4 American Institute of Physics conference proceedings; no.167 |
| Subjects: |