Defect control in semiconductors : proceedings of the International Conference on the Science and Technology of Defect Control in Semiconductors, the Yokohama 21st Century Forum, Yokohama, Japan, September 17-22 1989
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Amsterdam:
North-Holland,
1990.
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| Physical Description: | 2 v.: ill.; 27cm. |
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| Bibliography: | Includes bibliographical references and index |
| ISBN: | 0444884297 |