LPCVD silicon nitride and oxynitride films : material and applications in intergrated circuit technology
| Other Authors: | |
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| Published: |
Berlin:
Springer-Verlag,
1991.
|
| Series: | Research reports ESPRIT. Project 369;
vol. 1 |
| Subjects: |
HQ Library
| Call Number: |
TK7872 L63 1991 |
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| Accession | Item Category | Format | Status | Notes |
|---|
| 0000010071 | Open Shelf | Book | CIRCULATED |