LPCVD silicon nitride and oxynitride films : material and applications in intergrated circuit technology
| Other Authors: | |
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| Published: |
Berlin:
Springer-Verlag,
1991.
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| Series: | Research reports ESPRIT. Project 369;
vol. 1 |
| Subjects: |
| Item Description: | Includes bibliographical references |
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| Physical Description: | x, 159p.: ill.; 24cm. |
| ISBN: | 3540539549 (pbk) |